桑梅
- 教师拼音名称：SANG MEI
- 出生日期：1967-05-02
- 职务：Vice head of department of Optoelectronics
- 性别：女
- 职称：教授
- 所属院系：精密仪器与光电子工程学院
Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy
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- 所属单位:天津大学
- 发表刊物:Opt. Express
- 刊物所在地:USA
- 项目来源:国家重点研发计划项目
- 关键字:白光干涉，解调算法
- 摘要:Coherence scanning interferometry (CSI) is a common optical measurement method for measuring three-dimensional surface profiles. However, batwings and ghost steps are common
obstacles in CSI. In this paper, we proposed a gap-matching algorithm with the improved complete ensemble empirical mode decomposition with adaptive noise (impCEEMDAN) to solve the above two obstacles without any priori knowledge of the surface geometry from the tested sample. A micro-component with 500 nm and 1200 nm step heights and a 10 μm standard step of were used as test samples to evaluate the accuracy of the propos - 合写作者:Mei Sang, Xiangyu Du, Shuang Wang*, Tianhua Xu, Jie Dong, and Tiegen Liu
- 第一作者:Mei Sang
- 论文类型:Applied Research
- 通讯作者:Shuang Wang
- 卷号:28
- 期号:10/11
- 页面范围:15101-15111
- 是否译文:否
- CN号:null