School of Precision Instrument and Optoelectronics Engineering
Professor
Vice head of department of Optoelectronics
Fiber sensing, Intellegent image recognition
Current position: Personal Profile > Academic Achievements > Selected Papers
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Affiliation of Author(s):Tianjin University
Journal:USA
Place of Publication:Optics Express
Funded by:国家重点研发计划项目
Key Words:white-light interference, algorithm
Abstract:Coherence scanning interferometry (CSI) is a common optical measurement method for measuring three-dimensional surface profiles. However, batwings and ghost steps are common
obstacles in CSI. In this paper, we proposed a gap-matching algorithm with the improved complete ensemble empirical mode decomposition with adaptive noise (impCEEMDAN) to solve the above two obstacles without any priori knowledge of the surface geometry from the tested sample. A micro-component with 500 nm and 1200 nm step heights and a 10 μm standard step of were used as test samples to evaluate the accuracy of the propos
All the Authors:Mei Sang, Xiangyu Du, Shuang Wang*, Tianhua Xu, Jie Dong, and Tiegen Liu
First Author:Mei Sang
Indexed by:Applied Research
Correspondence Author:Shuang Wang
Volume:28
Issue:10/11
Page Number:15101-15111
Translation or Not:no
CN No.:null
