Xiao Mi

School

School of Electrical and Information Engineering

Professional Title

Associate professor

Discipline

High Voltage and Insulation Technology

Other Contact Information

Patents

Current position: 肖谧 > Academic Achievements > Patents

一种垂直生长的氧化锌薄膜的制备工艺

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First Author:肖谧

Patent Applicant:肖谧

Disigner of the Invention:肖谧

Description of the Invention:本发明提供了一种垂直生长的氧化锌薄膜的制备工艺,包括如下步骤:A.采用溶胶凝胶法在基板上制备氧化锌种子层;B.采用溶胶凝胶法在种子层上制备氧化锌薄膜。所述种子层的厚度为5NM~20NM。通过本发明,可在普通的大气环境下利用溶胶凝胶法在基板上成功地制备垂直生长的氧化锌薄膜。本发明工艺简单,方便快捷,便于实施,可广泛应用。

Type of Patent:Invent

Type of Patent:Authorized patents

Authorization number:2007100567943

Number of Inventors:1

Service Invention or Not:yes