X. Hu, C. Gu, X. Zhu, Y. Cheng, “Parallel electron- and ion-beam lithography systems,” China Patent #: ZL 2015 1 0037979.4, Issued date: Aug 10, 2018.
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上一条:X. Hu, X. Chi, K. Zou, “An RF-amplifier-free superconducting nanowire single-photon detector system,” China Patent #: ZL 2018 1 0349053.2, Issued date: Dec 31, 2019.
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