Xu Zongwei
Professor

Gender:Male

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Selected Papers

Nano-photomask fabrication using focused ion beam direct writing

Release time:2017-11-09 Hits:

Journal:CIRP Annals - Manufacturing Technology

All the Authors:F. Z. Fang*, Z. W. Xu, X.T. Hu, el al

Correspondence Author:F. Z. Fang

Volume:59

Page Number:543–546

Translation or Not:no

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