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Xu Zongwei
Professor
Gender:Male
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Academic Achievements
Current position::
Zongwei Xu in TJU
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Academic Achievements
Patents
Measurement method of cutting force and cutting profit of SEM online nano-cutting device
A precise method to accurate control the direction of suspending nanotube devices.
A novel micro/nano-fabrication method by focused ion beam implantation combining with fluoride xenon gas assisted etching.
Electron beam induced metal deposition method for increasing the lateral stiffness of suspending nanotube devices.
A nanofabrication method with coating assisted to develop good performance micro cutting tool with nanoscale cutting edge.
Books
Silicon carbide atomic scale manufacturing
General rules for focused ion beam system analysis (JYT 0583-2020)
Selected Papers
Patterning the surface structure of transparent hard-brittle material β-Ga2O3 by ultrashort pulse laser.Ceramics International.2022
Process exploration of β-Ga2O3 blind hole processing by water-assisted femtosecond laser technology.Journal of Alloys and Compounds.2023
Raman investigation of lattice anharmonicity and substrate-induced effects in AlN heteroepilayers.Ceramics International.2023
On the interpretation of confocal spectral depth profiling of color center and carrier concentration by photoluminescence and Raman of implanted 4H–SiC.Ceramics International.2022
Photoluminescence and Raman Spectroscopy Study on Color Centers of Helium Ion-Implanted 4H–SiC.Nanomanufacturing and Metrology.2020
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