Patents

Current position:: Zongwei Xu in TJU > Academic Achievements > Patents

A novel micro/nano-fabrication method by focused ion beam implantation combining with fluoride xenon gas assisted etching.

First Author:Fang, F.Z.

Disigner of the Invention:Fang, F.Z.; Xu, Z.W.; Hu, X.T.

Type of Patent:Invent

Type of Patent:Authorized patents

Authorization number:ZL200910067643.7

Service Invention or Not:no

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