Selected Papers

Current position:: Zongwei Xu in TJU > Academic Achievements > Selected Papers

Fabrication of Micro/Nano Structures using Focused Ion Beam Implantation and XeF2 Gas Assisted Etching

Journal:Journal of Micromechanics and Microengineering

All the Authors:Z. W. Xu, F. Z. Fang*, Y. Q. Fu, S. J. Zhang, T. Han, J. M. Li

First Author:Z. W. Xu

Correspondence Author:F. Z. Fang

Volume:19

Page Number:054003(9pp)

Translation or Not:no

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