School of Precision Instrument and Optoelectronics Engineering
Associate professor
北洋学者
Electrical Engineering, Microelectromechanical systems (MEMS), micro-sensors and micro-actuaors
086-13752255190
022-27401053
zml@tju.edu.cn
92 Weijin Road, Tianjin University, Nankai District, Tianjin, China
300072
Menglun Zhang received the B.S. and Ph.D. degrees from Tianjin University, China, in 2010 and 2015, respectively. He is now an Associate Professor at Tianjin University and State Key Laboratory of Precision Measurement Technology and Instruments. He was a visiting researcher at the Bioelectronics Group, Electrical Engineering Division, University of Cambridge, UK. His research interest is micro electromechanical system (MEMS), with a focus on piezoelectric micromachined sensors, actuators and electronics. He has published more than 50 papers as the first or corresponding author and a book chapter in MEMS field, covering research on micromachined speakers, ultrasonic transducers, resonant sensors and resonators. Because MEMS research is application orientated and multidisciplinary in nature, his research is led by industry needs and characterized by strong collaborations. He has authored or coauthored over 150 granted and pending patents in MEMS field. He serves as journal editor of Nanotechnology and Precision Engineering, guest editor of Journal of Physics D: Applied Physics, and reviewers for academic journals such as JMEMS, APL, SNA, IEEE Sens. J. and Microsyst. Nanoeng. As an IEEE Senior Member, he is active in international MEMS communities, e.g. IEEE MEMS Conference, Transducers Conference and Sensors Conference, and his Ph.D. student had been nominated as the Outstanding Student Paper Award Finalist at IEEE MEMS 2019. He believes that good work requires restriction (work like a bookkeeper), imagination (think like a poet), passion (cheer like a football fan) and devotion (focus for decades). He also enjoys being a mentor teaching students, instead of being a pedant teaching courses.
- PhD| Tianjin University| Electrical Engineering| 2015
- BSc| Tianjin University| Electrical Engineering| 2010
- piezoelectric Microelectromechanical systems (MEMS)
- resonators, resonant sensors, micro-acoustics
- Journal Editor of Nanotechnology and Precision Engineering
- Guest Editor of Journal of Physics D: Applied Physics
- IEEE Senior Member
- Senior Member of Chinese Society of Micro Nano Technology
- Member of Acoustical Society of China
- Reviewer for academic journals, e.g. Sensors and Actuators, Journal of Microelectromechanical Systems, Applied Physics Letters, and IEEE Sensors
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Department of Engineering | University of Cambridge | Visiting Researcher 
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School of Precision Instrument & Opto-electronics Engineering, State Key Laboratory of Precision Measuring Technology and Instruments | Tianjin University 
- Papers
- [1] Yi Gong, Menglun Zhang*, Sheng Sun, Wenlan Guo, Chen Sun, Wei Pang*, Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency Control, Journal of Microelectromechanical Systems, 2023, Early Access.
- [2] Hexu Luo, Menglun Zhang*, Yi Gong, Yuan Ning, Xuejiao Chen, Quanning Li, Wei Pang, Piezoelectric MEMS Oscillators Based on Flexural Mode Membrane Resonator Array for Resonant Sensors, IEEE Transducers Conference, Kyoto, Japan: IEEE, 2023.
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- [3] Xiaopeng Yang, Menglun Zhang*, Mengying Xie, Mingchao Sun, Hexu Luo, Quanning Li, Xuejiao Chen, Wei Pang*, Highly Sensitive Piezoelectric E-Skin Design Based on Electromechanical Coupling Concept, Advanced Electronic Materials, 2023, 9(5): 2201339.
- [4] Chengze Liu, Menglun Zhang*, Mingchao Sun, Linbing Xu, Yiming Lang, Shaobo Gong, Wei Pang*, Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions, Journal of Microelectromechanical Systems, 2022, 31(4): 664-672.
- [5] Sheng Sun, Jianyuan Wang, Menglun Zhang*, Yuan Ning, Dong Ma, Yi Yuan, Pengfei Niu, Zhicong Rong, Zhuochen Wang and Wei Pang*, MEMS ultrasonic transducers towards safe, low-power and portable eye-blinking monitoring, Microsystems & Nanoengineering, 2022, 8: 63.
- [6] Zhicong Rong, Menglun Zhang*, Yuan Ning and Wei Pang*, An ultrasound‑induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducers, Scientific Reports, 2022, 12: 16174.
- [7] Sheng Sun, Menglun Zhang*, Chuanhai Gao, Yi Gong, Jianyuan Wang, Yuan Ning, Qingrui Yang and Wei Pang*, MEMS ultrasonic fingertip heart rate sensor, IEEE Sensors Journal, 2022, 22(21): 20285-20292.
- [8] Yuan Ning, Menglun Zhang*, Yiming Lang, Yi Gong, Xiaopeng Yang and Wei Pang*, Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers, Journal of Microelectromechanical Systems, 2022, 31(3): 450-456.
- [9] Sheng Sun, Jianyuan Wang, Menglun Zhang*, Yi Yuan, Yuan Ning, Dong Ma, Pengfei Niu, Yi Gong, Xiaopeng Yang and Wei Pang*, Eye-Tracking Monitoring Based on PMUT Arrays, Journal of Microelectromechanical Systems, 2022, 31(1): 45-53.
- [10] Yiming Lang, Chengze Liu, Ahmed Fawzy, Chen Sun, Shaobo Gong, Menglun Zhang*, Piezoelectric Bimorph MEMS Speakers, Nanotechnology and Precision Engineering, 2022, 5(3): 033001.
- [11] Jianyuan Wang, Menglun Zhang*, Zhaoxun Wang, Sheng Sun, Yuan Ning, Xiaopeng Yang and Wei Pang*, An Ultra-Low Power, Small Size and High Precision Indoor Localization System Based on MEMS Ultrasonic Transducer Chips, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2022, 69(4): 1469-1477.
- [12] Sheng Sun, Jianyuan Wang, Yuan Ning and Menglun Zhang*, Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging, Nanotechnology and Precision Engineering, 2022, 5(1): 013002.
- [13] Xiaopeng Yang, Menglun Zhang*, Shaobo Gong, Mingchao Sun, Mengying Xie, Pengfei Niu, Wei Pang*, Chest-Laminated and Sweat-Permeable E-Skin for Speech and Motion Artifact-Insensitive Cough Detection, Advanced Materials Technologies, 2022, 8 (4): 2201043.
- [14] Zhenjie Ji and Menglun Zhang*, Highly sensitive and stretchable piezoelectric strain sensor enabled wearable devices for real-time monitoring of respiratory and heartbeat simultaneously, Nanotechnology and Precision Engineering, 2022, 5(1): 013004.
- [15] Linbing Xu, Mingchao Sun, Menglun Zhang*, Chengze Liu, Xiaopeng Yang, Wei Pang, A Piezoelectric MEMS Speaker with Stretchable Film Sealing, IEEE MEMS Conference, Munich, Germany: IEEE, 2023.
- [16] Mingchao Sun, Menglun Zhang*, Chengze Liu, Wei Pang, Broadband MEMS Speaker by Single-Way Multi-Resonance Array with Acoustic Damping Tuning: A Proof of Concept, IEEE MEMS Conference, Munich, Germany: IEEE, 2023.
- [17] Menglun Zhang, Weiwei Cui, Ji Liang, Daihua Zhang, Wei Pang, Hao Zhang*, A single-chip biosensing platform integrating FBAR sensor with digital microfluidic device, IEEE International Ultrasonics Symposium, Chicago, USA: IEEE, 2014, 1521~1523.
- [18] Menglun Zhang, Weiwei Cui, Daihua Zhang, Wei Pang, Hao Zhang*, Response signal enhancement of film bulk acoustic resonator mass sensor with bounded hydrophobic Teflon film, IEEE International Frequency Control Symposium, Taipei, China: IEEE, 2014, 1~4.
- [19] Yu Duan, Ye Chang, Ji Liang, Yuan Jiang, Wei Pang, Xuexin Duan and Menglun Zhang*, Wireless and passive piezoelectric microelectromechanical resonant sensors for realtime physical and biochemical sensing, International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), Dublin, Ireland: CBMS, 2016.
- [20] Yu Duan, Xin Li, Wei Pang and Menglun Zhang*, Wireless uncooled infrared detectors based on thin-film piezoelectric MEMS resonators, IEEE Sensors Conference, Glasgow, UK: IEEE, 2017.
- [21] Yao Lu, Hongxiang Zhang, Yuan Jiang, Hao Zhang, Wei Pang* and Menglun Zhang*, Bulk Modulus Measurement of Microfluidics by Longitudinal Bulk Acoustic Wave Sensors, IEEE MEMS Conference, Belfast, UK: IEEE, 2018.
- [22] Lin Zhang, Yuan Jiang, Bohua Liu, and Menglun Zhang*, and Wei Pang*, Highly Flexible Piezoelectric MEMS Resonators Encapsulated in Polymer Thin Films, IEEE MEMS Conference, Belfast, UK: IEEE, 2018.
- [23] Sheng Sun, Menglun Zhang*, Chuanhai Gao, Bohua Liu, and Wei Pang*, Flexible piezoelectric micromachined ultrasonic transducers towards new applications, IEEE International Ultrasonics Symposium, Kobe, Japan: IEEE, 2018.
- [24] Xin Sun, Menglun Zhang*, Chuanhai Gao, Bohua Liu, Ji Liang, and Wei Pang*, Flexible Lamb wave resonators based on lithium niobate thin film, IEEE International Ultrasonics Symposium, Kobe, Japan: IEEE, 2018.
- [25] Yuan Ning, Hongxiang Zhang, Menglun Zhang*, Buohua Liu, Xuexin Duan, and Wei Pang*, Acoustic droplet ejection by Lamb wave transducer array, IEEE MEMS Conference, Seoul, Republic of Korea: IEEE, 2019.
- [26] Chuanhai Gao, Menglun Zhang*, Yuan Jiang, Buohua Liu, and Wei Pang*, A monolithic FBAR oscillator based on heterogeneous system-on-chip integration, IEEE MEMS Conference, Seoul, Republic of Korea: IEEE, 2019.
- [27] Xi Zhang, Yao Lu, Menglun Zhang*, Hongxiang Zhang, Qingrui Yang and Wei Pang, A μTAS for liquid sample bulk modulus screening, IEEE Transducers Conference, Berlin, Germany: IEEE, 2019.
- [28] Yuan Ning, Menglun Zhang*, Xuexin Duan, and Wei Pang, Programmable Liquid Handling by a Multi-Resonant Transducer Array with Frequency Division Multiplexing, IEEE International Ultrasonics Symposium, Las Vegas, USA: IEEE, 2020.
- [29] Jianyuan Wang, Sheng Sun, Yuan Ning, Yi Gong, Menglun Zhang*, Wei Pang, A Spiral Archimedean PMUT Array with Improved Focusing Performance, IEEE International Ultrasonics Symposium, Xi’an, China: IEEE, 2021.
- [30] Jianyuan Wang, Sheng Sun, Yuan Ning, Menglun Zhang*, Wei Pang, Ultrasonic TDoA Indoor Localization Based on Piezoelectric Micromachined Ultrasonic Transducers, IEEE International Ultrasonics Symposium, Xi’an, China: IEEE, 2021.
- [31] Menglun Zhang, Weiwei Cui, Xuejiao Chen, Chao Wang, Wei Pang, Xuexin Duan, Daihua Zhang*, Hao Zhang*, Monolithic integrated system with electrowetting-on-dielectric actuator and film-bulk-acoustic-resonator sensor, Journal of Micromechanics and Microengineering, 2015, 25(2): 025002.
- [32] Menglun Zhang, Jingze Huang, Weiwei Cui, Wei Pang, Hao Zhang*, Daihua Zhang, Xuexin Duan*, Kinetic studies of microfabricated biosensors using local adsorption strategy, Biosensors & Bioelectronics, 2015, 74: 8-15.
- [33] Yu Duan, Ye Chang, Ji Liang, Hongxiang Zhang, Xuexin Duan, Hao Zhang, Wei Pang*, and Menglun Zhang*, Wireless Gas Sensing Based on a Passive Piezoelectric Resonant Sensor Array through Near-Field Induction, Applied Physics Letters, 2016, 109(26): 263503.
- [34] Yuan Jiang, Menglun Zhang*, Xuexin Duan, Hao Zhang, and Wei Pang*, A flexible, gigahertz, and free-standing thin film piezoelectric MEMS resonator with high figure of merit, Applied Physics Letters, 2017, 111(2): 023505.
- [35] Xing Yang, Ji Liang, Yuan Jiang, Xuejiao Chen, Hao Zhang, Menglun Zhang*, and Wei Pang*, AlN Lamb wave resonators on a flexible substrate, IEEE Electron Device Letters, 2017, 38(8): 1125-1127.
- [36] Xin Li, Ji Liang, Hongxiang Zhang, Xing Yang, Hao Zhang, Wei Pang*, and Menglun Zhang*, Resonant and resistive dual-mode uncooled infrared detectors toward expanded dynamic range and high linearity, Applied Physics Letters, 2017, 110(26): 263502.
- [37] Ji Liang, Zifeng Liu, Hongxiang Zhang, Bohua Liu, Menglun Zhang*, Hao Zhang, and Wei Pang*, On-chip nanofluidic integration of acoustic sensors towards high Q in liquid, Applied Physics Letters, 2017, 111(20): 203501.
- [38] Hongyuan Zhao, Shuangqing Fan, Yan Chen, Zhihong Feng, Hao Zhang, Wei Pang*, Daihua Zhang, and Menglun Zhang*, Oxygen Plasma-Treated Graphene Oxide Surface Functionalization for Sensitivity Enhancement of Thin-Film Piezoelectric Acoustic Gas Sensors, ACS Applied Materials & Interfaces, 2017, 9: 40774-40781.
- [39] Lin Zhang, Chuanhai Gao, Yuan Jiang, Bohua Liu, Menglun Zhang*, Hongxiang Zhang, Quanning Li, Xuejiao Chen, and Wei Pang*, Highly Bendable Piezoelectric Resonators for Flexible Radio-Frequency Electronics, Advanced Electronic Materials, 2018, 5(1): 1800545.
- [40] Yao Lu, Menglun Zhang*, Hongxiang Zhang, Jingze Huang, Zhan Wang, Zelin Yun, Yanyan Wang, Wei Pang*, Xuexin Duan, Hao Zhang, On-chip acoustic mixer integration of electro-microfluidics towards in-situ and efficient mixing in droplets, Microfluidics and Nanofluidics, 2018, 22: 146.
- [41] Menglun Zhang#, Jingze Huang#, Yao Lu, Wei Pang*, Hao Zhang, and Xuexin Duan*, Solid-State Microfluidics with Integrated Thin-Film Acoustic Sensors, ACS Sensors, 2018, 3: 1584−1591.
- [42] Yuan Jiang, Yuan Zhao, Lin Zhang, Bohua Liu, Quanning Li, Menglun Zhang*, and Wei Pang*, Flexible Film Bulk Acoustic Wave Filters toward Radiofrequency Wireless Communication, Small, 2018, 14: 1703644.
- [43] Chuanhai Gao, Menglun Zhang*, Yuan Jiang, FlexMEMS-enabled hetero-integration for monolithic FBAR-above-IC oscillators, Nanotechnology and Precision Engineering, 2019, 2(3): 105-109.
- [44] Yao Lu, Menglun Zhang*, Hongxiang Zhang, Yuan Jiang, Hao Zhang, and Wei Pang*, Microfluidic Bulk-Modulus Measurement by a Nanowavelength Longitudinal-Acoustic-Wave Microsensor in the Nonreflective Regime, Physical Review Applied, 2019, 11: 044091.
- [45] Xin Sun, Menglun Zhang*, Chuanhai Gao, Yuan Ning, Yi Yuan, and Wei Pang*, Flexible lamb wave resonators with high figure of merit, Applied Physics Letters, 2019, 115(9): 093501.
- [46] Ahmed Fawzy*, Yiming Lang, Menglun Zhang*, Design and analysis of piezoelectric MEMS micro-speaker based on scandium-doped AlN thin film, Micro & Nano Letters, 2020, 16(3): 227-231.
- [47] Menglun Zhang, Xi Zhang, Pengfei Niu*, Tao Shen, Yi Yuan, Yuantao Bai, and Zhilin Wang, On-site low-power sensing nodes for distributed monitoring of heavy metal ions in water, Nanotechnology and Precision Engineering, 2021, 4: 013005.
- [48] Yuan Ning, Menglun Zhang*, Hongxiang Zhang, Xuexin Duan, Yi Yuan, Buohua Liu and Wei Pang*, Mechanism and stability investigation of a nozzle-free droplet-on-demand acoustic ejector, Analyst, 2021, 146: 5650.
- [49] Xiaopeng Yang and Menglun Zhang*, Review of flexible microelectromechanical system sensors and devices, Nanotechnology and Precision Engineering, 2021, 4(2): 025001.