天津大学教师个人主页系统徐宗伟专利成果天大徐宗伟

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徐宗伟

教师拼音名称：Xu Zongwei
教师拼音名称：Xu Zongwei
职务：精仪系系主任
职务：精仪系系主任
性别：男
性别：男

专利成果

Current position:: 天大徐宗伟 >> 学术成就 >> 专利成果

· SEM在线纳米切削装置的切削力及切削盈利测量方法
· A precise method to accurate control the direction of suspending nanotube devices.
· A novel micro/nano-fabrication method by focused ion beam implantation combining with fluoride xenon gas assisted etching.
· Electron beam induced metal deposition method for increasing the lateral stiffness of suspending nanotube devices.
· A nanofabrication method with coating assisted to develop good performance micro cutting tool with nanoscale cutting edge.
· Ion beam assisted single crystal brittle material ultra-precision machining method.
· Proton beam assisted ultraprecise processing method for processing single crystal fragile material
· A novel nanofabrication method of star template for calibration the limiting resolution of precision microscopy equipment
· SERS substrate preparation method by focused ion beam direct writing combining with subsequent coating
· Nano cutting platform basing on SEM in-situ and online observation

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